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Why do chip factories often use Teflon materials?

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Nanjing Binglab
Why do chip factories often use Teflon materials?

With its unique chemical properties and physical characteristics, Teflon plays a key role in many aspects of the chip factory. Whether used in process equipment seals or as an anti-corrosion coating, it has become the material of choice for engineers. So what are the properties of Teflon material? Where are the specific applications in the chip factory?

Teflon is the trade name of polytetrafluoroethylene (PTFE), commonly known as “Plastic King”. PTFE is a synthetic fluoropolymer of tetrafluoroethylene. In PTFE, each carbon atom is covalently bonded to two fluorine atoms and shares two other covalent bonds with adjacent carbon atoms. This structure forms a linear polymer in which all free bonds on each carbon atom are occupied by fluorine. The carbon-fluorine (C-F) bond in the Teflon molecule is very stable. This structure gives PTFE many unique physical properties.

What are the characteristics of Teflon material?
Excellent chemical resistance:

Since the fluorine atoms completely surround the carbon backbone, few other chemicals can access and react with the carbon atoms. This all-round protection ensures that Teflon is extremely resistant to acids, bases, solvents and oxidizing agents. It is difficult for chemicals to adhere to the surface of Teflon, further enhancing its chemical resistance.

Wide operating temperature range:

Teflon’s operating temperature range is typically between -200°C and +260°C, which is a very broad range covering extremely low to extremely high temperatures. Teflon can maintain its physical and chemical properties at extremely low temperatures, and it remains chemically stable at high temperatures, and it is not easy to decompose and will not release toxic gases.

Excellent dielectric properties:

The dielectric constant of Teflon is low, about 2.1 at room temperature, and it is relatively stable in its entire working temperature range. This means that it responds less to electric fields and therefore has very good insulating properties.

No embrittlement or aging:

Many plastics become brittle or age and break easily when subjected to mechanical stress or prolonged exposure to certain environments. However, Teflon has excellent resistance to embrittlement and aging. Teflon’s non-brittle and non-aging properties stem from its unique molecular structure that provides a high degree of flexibility.

A smooth surface finish can be achieved with:

Teflon can be processed into a very smooth surface, and its surface roughness can reach the nanometer level.

Application of Teflon in semiconductor field
  1. Corrosion-resistant pipes and fittings

During semiconductor production, many corrosive chemicals are frequently used. Due to its chemical inertness, Teflon is able to withstand these chemicals and thus is widely used in pipes, valves, fittings, etc. in production lines.

2. Gas delivery system

During vapor phase chemical deposition (CVD) and etch processes, various gases need to be precisely controlled and delivered. Teflon can be used in components of gas delivery systems to ensure pure and accurate delivery of gases.

3. Liquid cooling system

Because Teflon has good chemical stability to many chemicals, it can be used in liquid cooling systems to deliver coolant without fear of reacting with other chemicals in the system.

4. Seals and Gaskets

Teflon’s flexibility and chemical stability make it an ideal material for seals and gaskets. This feature is especially important in applications that require sealing against aggressive chemicals or operating at extreme temperatures.

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